NU Micro/Nano Fabrication Facility (NUFAB)
NUFAB Access Request, hands-On Clean Room Training and equipment Training.
What they do
- Services
- NUFAB Access Request
- Hands-On Clean Room Training
- Equipment Training
- Process Support (Tech Assist)
- Atomic layer deposition
- Deep oxide etching
- E-beam evaporation
- Ion milling
- Photolithography
- Reactive ion etching
- Rapid thermal processing
- Wafer dicing
- Hall effect measurements
- Wire bonding
- Class-100 cleanroom
- Sputter III - AJA - Niobium
- Quantum Deposition System - Plassys
- F20 Thin-Film Analyzer
- RIE 10NR - Samco
- ALD - Savannah S100
- E-Beam Evaporator - Auto 306
- E-Beam Evaporator - Auto 500
- Mask Aligner - Q4000
- Mask Aligner - MABA6
- Automatic Wire Bonder - TPT HB100
- AmScope ME600T
- Electrical Test - IV/CV
- Sem-fib-eds
- 3D printing