Chapel Hill Analytical and Nanofabrication Laboratory
Fabrication services, characterization services and instrument training.
What they do
- Services
- Fabrication services
- Characterization services
- Instrument training
- Experimental-plan assistance
- Scanning Electron Microscopy
- Transmission Electron Microscopy
- Atomic Force Microscopy
- FIB lift-out
- Cryo Ultramicrotome
- Atomic Layer Deposition
- Chemical Vapor Deposition
- E-beam evaporation
- Metal Sputtering
- Deep Reactive Ion Etching
- Mask Aligner
- E-beam lithography
- Focused Ion Beam
- Stylus Profilometry
- X-ray Photoelectron Spectroscopy
- Ultraviolet Photoelectron Spectroscopy
- Microspectrophotometry
- Fourier Transform Infrared
- Atomic Force-Infrared
- Spectroscopic Ellipsometry
- Energy Dispersive Spectroscopy
- X-ray Diffraction
- MALDI-ToF
- Differential Scanning Calorimeter
- Thermogravimetric Analyzer
- Nano/micro fabrication
- Nano/micro characterization
- Class 100 and 1000 cleanroom
- Open-access facility