Yale University Cleanroom Facilities
Back-end processing, chemical vapor deposition and dry and plasma etching.
What they do
- Services
- Back-end processing
- Chemical vapor deposition
- Dry and plasma etching
- Photolithography
- Metrology
- Physical vapor deposition
- Wet benches
- Equipment training
- Plasma-enhanced CVD
- Atomic layer deposition
- RCA cleaning process
- RCA clean technique
- Deep Reactive Ion Etching
- Thermo-compression bonding
- Supercritical drying
- Contact profilometry
- Ellipsometry
- Direct-write lithography
- Class 1000 environments
- Class 100 environments
- Thin-film deposition
- High-selectivity etching
- Photolithography solution
- Thin-film characterization
- HV/UHV deposition
- Electron beam evaporation
- Reactive ion etching
- Surface activation
- Maskless photolithography
- 3D microprinting