Nanofabrication Facility
Electronics SystemsDesign Services, processing and foundry services and furnace processing.
What they do
- Services
- Electronics SystemsDesign Services
- Processing and foundry services
- Furnace processing
- Wet oxidation
- Dry oxidation
- Anneals
- Undoped poly
- TEOS
- Stoichiometric nitride
- SNF RCA clean
- Double-piranha process
- Lithography
- Photolithography
- Etching
- Ion implantation
- Chemical vapor deposition
- Physical sputtering
- Electrical testing
- Fabrication
- In-line characterization
- Flexible lithography
- Heterogeneous integration
- Rapid micro prototyping
- 4" substrates
- 6" substrates